Mendeley出力
Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena
書誌詳細を非表示
| 出版情報 | New York : American Institute of Physics , 1991- |
|---|---|
| 巻次年月次 | Vol. 9, no. 1 (Jan./Feb. 1991)- |
| 刊行頻度 | 隔月刊 |
| 別書名 | 表紙タイトル:Journal of vacuum science and technology. B, 2nd series. Nanotechnology & microelectronics: mateials, processing, mesurement, & phenomena 背表紙タイトル:JVSTB, Nanotechnology & microelectronics |
| 本文言語 | 英語 |
| 変遷注記 | 継続前誌:Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society |
| ISSN | 21662746 |
| NCID | AA10804928 |