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Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA / Ghanim A. Al-Jumaily, ... [et al.] chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
(Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4099)

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1F図書
A9/SP/4099 9933368

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出版情報 Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering , c2000
本文言語 英語
大きさ ix , 328 p. : ill. ; 28 cm
一般注記 Includes bibliographical references and index
著者標目 Al-Jumaily, Ghanim A.
Duparré, Angela
 Singh, Bhanwar, 1952-
 Society of Photo-optical Instrumentation Engineers
ISBN 0819437441
NCID BA49673994