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Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society
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| 出版情報 | New York : American Institute of Physics , 1983-1990 |
|---|---|
| 巻次年月次 | Vol. 1, no. 1 (Jan./Mar. 1983)-v. 8, no. 6 (Nov./Dec. 1990) |
| 刊行頻度 | 隔月刊 |
| 別書名 | 略タイトル:J. vac. sci. technol., B, Microelectronics process. phenom キータイトル:Journal of vacuum science & technology. B, Microelectronics processing and phenomena 異なりアクセスタイトル:Journal of vacuum science and technology. B, Microelectronics processing and phenomena 異なりアクセスタイトル:Microelectronics processing and phenomena |
| 本文言語 | 英語 |
| 一般注記 | Title from cover Issued also on microfilm |
| 変遷注記 | 継続前誌:Journal of vacuum science and technology / American Vacuum Society 継続後誌:Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena |
| ISSN | 0734211X |
| NCID | AA10635106 |