Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California

Smart structures and materials 1998 : smart electronics and MEMS : 2-4 March 1998, San Diego, California / Vijay K. Varadan ... [et al.], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ... [et al.] ; cooperating organizations, Air Force Research Laboratory ... [et al.]
(Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3328)

配架場所	巻　次	請求記号	登録番号	状　態	利用注記	予約
1F図書		A9/SP/3328	9932391

出版情報	Bellingham, Wash., USA : SPIE , c1998
本文言語	英語
大きさ	ix, 430 p. : ill. ; 28 cm
別書名	異なりアクセスタイトル:Smart electronics and MEMS
一般注記	Includes bibliographical references and index
著者標目	Varadan, V. K., 1943- Society of Photo-optical Instrumentation Engineers Air Force Research Laboratory (Wright-Patterson Air Force Base, Ohio)
件　名	LCSH:Microelectronics -- Materials -- Congresses 全ての件名で検索 LCSH:Smart materials -- Congresses 全ての件名で検索 LCSH:Microelectromechanical systems -- Congresses 全ての件名で検索 LCSH:Actuators -- Congresses 全ての件名で検索
分　類	LCC:TK7874 DC21:621.381
ISBN	0819427721
NCID	BA42700228