Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA / Ghanim A. Al-Jumaily, ... [et al.] chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
(Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4099)
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| 配架場所 | 巻 次 | 請求記号 | 登録番号 | 状 態 | 利用注記 | 予約 |
|---|---|---|---|---|---|---|
| 1F図書 |
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A9/SP/4099 | 9933368 |
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| 出版情報 | Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering , c2000 |
|---|---|
| 本文言語 | 英語 |
| 大きさ | ix , 328 p. : ill. ; 28 cm |
| 一般注記 | Includes bibliographical references and index |
| 著者標目 | Al-Jumaily, Ghanim A. Duparré, Angela Singh, Bhanwar, 1952- Society of Photo-optical Instrumentation Engineers |
| ISBN | 0819437441 |
| NCID | BA49673994 |

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