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Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia / Neil W. Bergmann, Derek Abbott, Ahsan J. Hariz, Vijay K. Varadan, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, ; cosponsored by U. S. Air Force Office of Scientific Reserch Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section
(Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4591)