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Advances in mirror technology for X-ray, EUV lithography, laser, and other applications II : 5 August 2004, Denver, Colorado, USA / Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
(Proceedings / SPIE -- the International Society for Optical Engineering ; v. 5533)