Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society

フォーマット:

雑誌

言語:

英語

出版情報:

New York : American Institute of Physics, 1983-1990

形態:

8 v. : ill. ; 29 cm

巻次（年次）:

Vol. 1, no. 1 (Jan./Mar. 1983)-v. 8, no. 6 (Nov./Dec. 1990)

継続前誌:

Journal of vacuum science and technology / American Vacuum Society <AA00708677>

継続後誌:

Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena <AA10804928>

書誌ID:

AA10635106

ISSN:

0734211X