1.

雑誌
雑誌
1. Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society
出版情報: New York : American Institute of Physics, 1983-1990
巻次（年次）: Vol. 1, no. 1 (Jan./Mar. 1983)-v. 8, no. 6 (Nov./Dec. 1990)
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2.

雑誌
雑誌
2. Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
American Vacuum Society ; American Institute of Physics
出版情報: New York : American Institute of Physics, 1983-
巻次（年次）: Vol. 1, no. 1 (Jan./Mar. 1983)-
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