1.

図書
図書
1. Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia
Neil W. Bergmann, Olaf Reinhold, Norman C. Tien, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society(Australia), Queensland Government State Development(Australia)
出版情報: Bellingham, Wash. : SPIE--the International Society of Optical Engineering, c1999
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 3891
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2.

図書
図書
2. Electronics and structures for MEMS II : 17-19 December 2001, Adelaide, Australia
Neil W. Bergmann, Derek Abbott, Ahsan J. Hariz, Vijay K. Varadan, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, ; cosponsored by U. S. Air Force Office of Scientific Reserch Asian Office of Aerospace Research and Development ... [et al.] ; cooperating organization, IEEE South Australia Section
出版情報: Bellingham, Wash. : SPIE--the International Society of Optical Engineering, c2001
シリーズ名: Proceedings / SPIE -- the International Society for Optical Engineering ; v. 4591
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